気相からのダイヤモンド簿膜の成長

抄録

Recently, it is confirmed that diamond thin films and particles with good crystallinity can be grown from the vapor phase. These diamonds have been formed by using several techniques such as chemical vapor deposition.
In this paper, the growth methods of diamond from the vapor phase, especially dc-plasma chemical vapor deposition proposed by the authors, are reviewed considering the characterization of diamond thin films and particles.
The growth mechanism of diamond in a meta-stable condition will be given briefly by using the results of plasma diagnostics.