Surface vibration of CVD-grown diamond surface is measured by HR-EELS. Hydrogen is adsorbed on the sp3-hybridized carbon. On the (001) 2×1 surface, one C-H stretching vibration appears consistently with the dieter-chain model. On the (111) 1×1 surface, two C-H stretching modes appear, which suggests methyl termination model. But the phonon dispersion in the low energy region is well explained by the monohydride termination model. Uniformity of the surface should be checked to discuss this inconsistency. Hydrogen exchange with the gas-phase and the hydrogen desorption/adsorption processes are also investigated.