電子線ホログラフィーによる結晶内部電位の測定

抄録

We describe electron holographic measurement of inner potential in crystals. When an electron wave passes through a thin crystal, the phase of the electron wave is shifted by the potential. Using electron holography, the potential can be measured from the phase shift of the electron wave. We also describe an application of this technique to dopant-profiling in semiconductor devices.