抄録
In this paper, we considered a polymer-based piezoelectric stack actuator based on MEMS nano-positioning technology. A no-wiring structure was used for simplicity of fabrication and to avoid irregularity deformation under wiring. We selected the key parameters for actuation design, and a simulation was executed through FEM analysis of the electric field and deformation. From this simulation, we decided upon the appropriate parameters of the actuator.
