2010 年 16 巻 1 号 p. 23-26
Tetraethoxysilane (TEES) is produced as a major by-product from the disproportionation of triethoxysilane (TRES) during the non-halogen process to produce monosilane SiH4 for polycrystalline silicon manufacturing. In this study, the hydrolysis of TEES was carried out to produce silica fines in the gaseous phase as an effective use of the TEES by-product. We expected to attain higher conversion under lower temperature than in the case of tetramethoxysilane TEMS. One-hundred percent conversion was obtained under 923 K and above, and such temperature is relatively low compared to the 100% conversion temperature of TEMS, which was more than 1123 K.
