Fine Powder Synthesis by Hydrolysis of Alkoxysilane Compounds in Gaseous Phase

DABOUSSI Olfa; KOBAYASHI Toru; TACHI Kengo; KATO Shigeru; SATOKAWA Shigeo; YAMASAKI Akihiro; KOJIMA Toshinori

doi:10.11190/jer.16.23

Original Article

Fine Powder Synthesis by Hydrolysis of Alkoxysilane Compounds in Gaseous Phase

DABOUSSI Olfa, KOBAYASHI Toru, TACHI Kengo, KATO Shigeru, SATOKAWA Shigeo, YAMASAKI Akihiro, KOJIMA Toshinori

著者情報

キーワード: Tetraethoxysilane, Hydrolysis, Temperature, Gaseous phase, Fine particle

ジャーナルフリー

2010 年 16 巻 1 号 p. 23-26

DOI https://doi.org/10.11190/jer.16.23

詳細

抄録

Tetraethoxysilane (TEES) is produced as a major by-product from the disproportionation of triethoxysilane (TRES) during the non-halogen process to produce monosilane SiH₄ for polycrystalline silicon manufacturing. In this study, the hydrolysis of TEES was carried out to produce silica fines in the gaseous phase as an effective use of the TEES by-product. We expected to attain higher conversion under lower temperature than in the case of tetramethoxysilane TEMS. One-hundred percent conversion was obtained under 923 K and above, and such temperature is relatively low compared to the 100% conversion temperature of TEMS, which was more than 1123 K.

責任著者(Corresponding author)

J-STAGEへの登録はこちら（無料）