The temperature dependence of thermit type reaction of molten aluminum and silica was investigated. Reacted depth was measured for amorphous silica rods immersed in pure molten Al or Al-5 mass%Mg alloy at various temperatures up to 1273K for a certain period. It is clarified that the reaction rate peaks around 1173K, and the rate at 1273K is 10 times lower than that at the peak temperature. Reacted substrates formed above the peak temperature has coarser microstructure than those formed below the peak temperature. Furthermore, intermediate layers are observed between the reacted substrates and unreacted silica. This indicates that the diffusion of aluminum into silica beyond the thermit reaction may have caused the decrease in the rate above the peak temperature.