日本フルードパワーシステム学会論文集
Online ISSN : 1349-7022
Print ISSN : 1880-3121
ISSN-L : 1349-7022
研究論文
気体用の超精密高速応答圧力レギュレータの開発
川嶋 健嗣加藤 友規山崎 俊平香川 利春
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ジャーナル フリー

2007 年 38 巻 2 号 p. 29-34

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抄録
The pressure regulator is a substantial element in a pneumatic system. In this paper, we propose a regulator that achieves precise pressure control with high a dynamic response using a pressure differentiator (PD sensor) which we have developed. The regulator consists of an isothermal chamber, a servo valve, a pressure sensor, a laminar flow meter, and the PD sensor. Slight changes of pressure in the chamber can be detected by the PD sensor and is fed back to the servo valve to maintain the pressure at a desired value. The effectiveness of the developed regulator was confirmed experimentally in comparison with commercially available pressure regulators.
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