超音波振動を利用したマルチパーパス微小流体駆動デバイス

（第１報，概念の提案とマイクロミキサとしての評価）

抄録

This paper describes the design, fabrication, and evaluation of a multi-purpose component for micro total analysis system (μTAS). The component achieves two functions for μTAS application. One is a micropump which transports the liquid and the other is a micromixer which stirs the liquid. With this component, it is possible to downsize a total system because there is no need to integrate pump and mixer separately. This paper proposes the pumping/mixing functions be achieved using ultrasonic vibrations. When operating as a pump, it uses a traveling vibration on ultrasonic vibrator, and when as a mixer, it uses a standing vibration. The ultrasonic vibrator is composed of a PZT disk (φ20mm×0.5mm), a brass disk (φ20mm×2mm) and a phosphor bronze disk (φ30mm×0.1mm). The liquid chamber is φ28mm×1mm. The mixing experiment confirms the effectiveness of the proposed mixing principle.