抄録
In this report, usefulness of seal elasticity for high accuracy positioning in a pneumatic cylinder is shown. When piston moves to desired position, the seal slides and attaches to cylinder wall. If the elastic seal attaches near the desired position, the slight displacement is corrected by its compliance with increasing or decreasing cylinder pressure, before the seal slides again. The slightly displaced operation is suitable for executing a integral compensation to reduce steady positioning error. The usefulness of seal elasticity for integral compensation to high accuracy positioning is tested in a pneumatic servo system which uses solenoid valves and the valve opening duration is operated by integrating the position error, theoretically and experimentally.
