JOURNAL OF THE ILLUMINATING ENGINEERING INSTITUTE OF JAPAN
Online ISSN : 1349-838X
Print ISSN : 0019-2341
ISSN-L : 0019-2341
Original Papers
Structure and Secondary Electron Emission Coefficient of Diamond Films Deposited by Hot-filament CVD
Masahiko MurakamiSatoshi YamaguchiNobuya TakabatakeTakayuki MisuMiki GotoToshihiko Arai
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2012 Volume 96 Issue 5 Pages 293-297

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Abstract

Hot-filament chemical vapor deposition (CVD) of diamond was used to obtain polycrystalline diamond thin film electrodes on silicon substrates. Deposition was carried out by using a mixture of CH4/H2 gases through a heated reactor in which a hot tungsten filament was held near the substrates. The films were evaluated by using a scanning electron microscope (SEM), Raman spectroscopy, and a photoacoustic method. The breakdown voltages for the electrodes of the CVD diamond thin films were measured under various Ne pressures by using a V-Q Lissajous method. The secondary electron emission coefficient of the diamond thin film electrodes increased as Raman spectra intensity at 1333 cm-1 and optical penetration depth increased.

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© 2012 The Illuminating Engineering Institute of Japan
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