二段階電解で生成した結晶性アノード酸化アルミナ皮膜の構造と誘電特性に及ぼす電解液種とその組合せの影響

抄録

The effects of electrolyte species and electrolytes combination during two-step anodization of anodic oxide films formed on aluminum in relation to the crystallinity and dielectric properties as an electrolytic capacitor was investigated. Aluminum substrate was pre-treated by dipping in boiling water to form hydration layer. Anodic films were annealed at 500°C after the first anodization. The CV (capacitance C multiplied by withstand voltage V of the film) of the films formed by the second anodization in borate was higher than that of the films formed in the same electrolyte of the first anodization. The CV increased due to the improvement of crystallinity by using borate for second anodization in the following order: salicylate<succinate<tartrate<phosphate<citrate<adipate<borate. When phosphate or organic electrolytes were used at the second anodization, notable spike noises were found. However, the spike noises were significantly suppressed when borate was used as the second anodization.