Abstract
Sm-Fe thin films as giant magnetostrictive materials were prepared by d.c. magnetron sputtering process with Ar or mixed Ar-N2 gas. Diffraction peaks of Sm nitride and Fe nitride were observed at 3.8×10-3 Pa N2 partial pressure. With increasing N2 partial pressure, saturated magnetostriction of the Sm-Fe thin films decreased from 1400 ppm to 600 ppm. The maximum value of magnetostrictive susceptibility was showed at 2.3×10-3 Pa of N2 partial pressure. A compression stress with a small addition of N into Sm-Fe thin films may lead to increase of magnetostrictive susceptibility.
