Abstract
In 1969 Deb suggested that the color of amorphous thin film of WO3 changes to blue by simultaneous injection of cations and electrons, according to the reaction
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oindentThe rate-controlling step of this electrochromic reaction is the slow diffusion of cations in the tungsten oxide film. In the present study, the conditions of formation of oxygen deficient thin films of tungsten oxide WO3−δ by RF sputtering were systematically changed and the properties of the formed thin films were measured. Also, the interdiffusivity of Li+ ions in the thin films was measured as a function of oxygen deficiency δ and of the content of lithium ions in the thin films. The diffusivity was about 10−15 m2/s at 296 K. The diffusivity increased with the increase of the δ value and slightly decreased with the increase of the lithium content.
