Standard Gibbs Energies of Formation of SiCl₂(g) and SiCl₃(g) Species at 1000 to 1300 K

Abstract

The equilibria in the Si(s)-Cl₂(g) system have been studied at temperature from 1000 to 1300 K using a transpiration reactor. The equilibria are considered among Si(s)-Cl₂(g)-SiCl₂(g)-SiCl₃(g)-SiCl₄(g). The standard Gibbs energies of formation for the species of SiCl₂(g) and SiCl₃(g) species at these temperatures are determined simultaneously, where these subchloride species coexist in appreciable quantities with SiCl₄ in the gas phase at these temperatures, as follows:
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