Abstract
Multi-layered electrostatic actuator driven by Current Source Inverter(CSI) is developed. The actuator has 10 or 20 pairs of sheets interleaved together and enclosed in ready-to-use package filled with a dielectric liquid. Sliding forces are generated on the surface of each film that have 3-phase electrodes applied 3-phase sinusoidal high-voltaged wave. As the actuator is variable- capacitance load, that is able to drive by CSI. CSI has PWM control-circuit with switching-mode selected by sign of references. the actuator will be used in wide range of aplication fields scaling from micro manipulators to massive mobile robots.
