Journal of the Japanese Association for Crystal Growth
Online ISSN : 2187-8366
Print ISSN : 0385-6275
ISSN-L : 0385-6275
Orientation Control and Hetero-Epitaxy of Oxide Thin Films(<Special Issue>Mechanism of Heteroepitaxy)
Norifumi FujimuraTaichiro Ito
Author information
JOURNAL FREE ACCESS

1993 Volume 20 Issue 4 Pages 355-366

Details
Abstract
Preferred orientation (fiber texture) or epitaxial orientation was controlled using ZnO film with 3 dimensional covalent bond, (Ca, Sr) CuO_2 with 2 dimensional covalent bond, and LiNbO_3 (LiTaO_2) with ionic bond. For ZnO film, (0001), (112^^-0), and (1010) films were obtained on glass. For (Ca, Sr)CuO_2, (001) and (101) films were ob-tained on glass, (110) and (101) were obtained on (100) MgO. On R-cut sapphire, the orientation of the LiNbO_3 film changed from (011^^-2) to (101^^-0) via (112^^-0) by increasing the Li concentration in the film. Furthermore, the concepts to control these textures were proposed.
Content from these authors
© 1993 The Japanese Association for Crystal Growth
Previous article Next article
feedback
Top