Journal of the Japanese Association for Crystal Growth
Online ISSN : 2187-8366
Print ISSN : 0385-6275
ISSN-L : 0385-6275
Epitaxial Lateral Overgrowth of InGaAS on patterned GaAs substrates by Liquid Phase Epitaxy(II)
S. IidaY. HayakawaT. KoyamaM. Kumagawa
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1998 Volume 25 Issue 3 Pages A101-

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Abstract
The In_xGa_<1-x> As (x=0.06) bridge layers grown on SiN_x-masked GaAs (111)B substrates with trenches by liquid phase epitaxial method were characterized by photoluminescence measurements. For epitaxially lateral overgrown and bridge layers, an intense with sharp FWHM spectrum was observed. This result was consistent with the low etch pit density measured in these layers.
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© 1998 The Japanese Association for Crystal Growth
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