Journal of the Japanese Association for Crystal Growth
Online ISSN : 2187-8366
Print ISSN : 0385-6275
ISSN-L : 0385-6275
Study on OSF-ring in a CZ-Si crystal by light scattering tomography and TEM
Minya MaToshiharu IrisawaTomoya Ogawa
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2000 Volume 27 Issue 1 Pages 11-

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Abstract
It is well known that the OSF-rings are generated in the CZ-Si crystal, annealing at a high temperature for several hours. Many observations showed that oxygen precipitates with high density inhomogeneously appeared in OSF-ring area. We newly observed the dark strips in this region by photoluminescence image. TEM analysis further exposed that the dark stripes are related to the stacking faults.
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© 2000 The Japanese Association for Crystal Growth
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