Theoretical Studies of Epitaxial Growth on Semiconductor Lattice-Mismatched Systems Relation between Macroscopic Growth Behavior and Microscopic Mechanism : Theory of Crystal Growth(<Special Issue>Frontiers of Thin Film Crystal Growth for the New Millennium)

Abstract

We discuss the relation between microscopic mechanism and macroscopic growth behavior. First, we introduce a macroscopic theory of growth behavior in semiconductor heteroepitaxy that includes the effects of the formation of Stranski-Krastanov (SK) islands and the misfit-dislocations (MDs). This theory can reproduce the various types of growth behavior observed in heteroepitaxial growth. Next, we have formulated a procedure for determining the phenomenological parameters that includes atomistic calculations. The critical thickness of InAs/GaAs (110) obtained by this procedure is in good agreement with the experimentally obtained value.