針状ナノシリコン結晶の構造解析(ナノ粒子I)
2003 年 30 巻 3 号 p. 38-
詳細
2003 年 30 巻 3 号 p. 38-
We have found that nano-needle silicon crystals are fabricated on silicon wafer by being exposed to microwave plasma of methane/hydrogen gas mixture with negative biasing after deposition of iron ultra-fine particles by DC sputtering. The size of the nano-needle is 1μm in height 100-200 nm in diameter, and a few nm in top radius, typically. The nano-needle silicon crystals are made of crystalline silicon coated with carbon thin films of a few nm thick.
