日本結晶成長学会誌
Online ISSN : 2187-8366
Print ISSN : 0385-6275
ISSN-L : 0385-6275
25pB02 強磁場中におけるZnOのMOCVD成長(III)(半導体エピ(2),第34回結晶成長国内会議)
高野 鉄平秋山 周哲春日 正伸廣嶋 綱紀矢野 浩司岸尾 光二
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2004 年 31 巻 3 号 p. 133-

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Metalorganic chemical vapor deposition of zinc oxide film was performed in a high magnetic field of 10 tesla with diethyl zinc and water vapor as starting materials. Reducing in deposition rate, particle size and suppression of leaflet like structure were observed as the effect of magnetic field. These effects can be understood by assuming a model where the mobility of the adsorbed atoms on the growing crystals is reduced by the magnetic field due to Lorentz force.
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© 2004 日本結晶成長学会
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