Journal of the Japanese Association for Crystal Growth
Online ISSN : 2187-8366
Print ISSN : 0385-6275
ISSN-L : 0385-6275
17pB07 Low temperature epitaxial growth of GaN on nearly lattice matched ZrB_2 substrates(NCCG-35)
Yuuji KawaguchiAtsushi KobayashiJitsuo OhtaHiroshi Fujioka
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2005 Volume 32 Issue 3 Pages 146-

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Abstract
We have grown GaN on nearly lattice matched ZrB_2 substrates at low substrate temperatures by the use of PLD. We have found that high quality GaN grows on ZrB_2 substrates with the layer-by-layer mode even at room temperature. This success can be attributed to the suppression of interfacial reaction between GaN and ZrB_2.
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© 2005 The Japanese Association for Crystal Growth
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