総合報告
β-Ga2O3結晶中の欠陥（転位，ナノパイプ）評価
2017 年 44 巻 4 号 論文ID: 5-44-4-04
詳細
2017 年 44 巻 4 号 論文ID: 5-44-4-04
We have investigated defects in beta-type gallium oxide (β-Ga2O3) single crystals by X-ray topography, selective etching, and transmission electron microscopy. Two types of defects, namely, dislocations and nanopipes, were found. Dislocations are screw dislocations with Burgers vector parallel to [010]. Nanopipes are hollow slits having rod-like cross section and elongated along [010].
