透過電子顕微鏡による金属ナノ粒子焼結のその場3次元観察

抄録

  Metal nanoparticles undertake sintering at a lower temperature compared to their bulk counterparts, attracting great attention in industrial applications such as printed electronics. Since nanoparticles are easy to aggregate, the three-dimensional (3D) visualization of their sintering process plays a vital role in quantifying the morphological changes during heating. However, the nanoparticles are sensitive to surface contamination, resulting in poor affinity to the 3D visualization with conventional electron beam intensity because the visualization technique requires a long beam exposure time, potentially making beam induced contamination significant. In this paper, we demonstrate our developed 3D observation scheme, including advanced image processing techniques. A sample transfer system, which enables to prevent nanoparticles from being exposed to air, and an ultra-low-electron dose observation protocol prevents surface contamination during the observation. The low-signal-to-noise ratio of acquired images is compensated by the advanced image processing techniques. The obtained 3D images of nanoparticles enable to measure the neck growth and variation of particle distance in 3D during the sintering in a quantitative way.