主催: The Japan Society of Applied Physics
会議名: International Conference and Summer School on Advanced Silicide Technology 2014
開催地: Tokyo, Japan
開催日: 2014/07/19 - 2014/07/21
We investigated the surface potential distributions around grain boundaries (GBs) in phosphorus (P)-doped n-BaSi2 thin-films by Kelvin probe force microscopy (KFM) and the crystal planes constituting GBs by transmission electron microscopy (TEM). By KFM measurements, it was found that the GBs in P-doped n-BaSi2 are different from those in undoped BaSi2; undoped n-BaSi2 has a downward band bending around the GBs with barrier heights of approximately 30 meV. In contrast, P-doped n-BaSi2 has an upward band bending with barrier heights of approximately 15 meV. TEM observation revealed that most of the GBs in P-doped BaSi2 are composed of BaSi2 (011)/() planes. This result is the same as that in undoped BaSi2.