JJAP Conference Proceedings
Online ISSN : 2758-2450
Asia-Pacific Conference on Semiconducting Silicides and Related Materials - Science and Technology Towards Sustainable Electronics (APAC Silicide 2016)
セッションID: 011106
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Light emission and detection materials
Dependence of direct transition energy on growth temperature in β-FeSi2 epitaxial films
Motoki IinumaHiroaki TsukamotoNaoki MurakosoHaruki YamaguchiYoshikazu Terai
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Direct transition energy (Eg) of β-FeSi2/Si(111) epitaxial films grown at different growth temperatures (Ts) was investigated by photoreflectance (PR) measurements. In Raman spectra, the wavenumber of Ag-mode in Fe–Fe and Si–Si vibrations shifted to higher wavenumber with decrease of Ts. The estimated Si/Fe composition ratio of the epitaxial layer became small (Si-poor) in the films grown at lower Ts. In PR spectra, Eg shifted to higher energy with decrease of Ts. These results show that the modification of electronic structure by a strain induced at β-FeSi2/Si hetero-interface is suppressed by an increase of Si vacancies in β-FeSi2.

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This article is licensed under a Creative Commons [Attribution 4.0 International] license.
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