抄録
A MEMS scanner grating projector is capable of projecting a cosinusoidal graiting pattern by using a 1-D MEMS scanner and a line laser. This projector scans a laser to be capable of performing projection without focal depth. Further, this projector is capable of shifting a phase of a grating pattern and changing the pitch thereof. In this paper, a shape measurement system with a deep measuring range is developed by using this projector. By using the phase-shifting method and a phase unwrapping method using gratings with two different types of pitches, a measuring range is expanded. This phase unwrapping method is capable of measuring a height of a wide range at a resolution when the pitch of a grating is small. Further, this shape measurement system is applied to bin-picking to show its effectiveness.
