抄録
Whole-space tabulation method is a technique to relate phase of projected grating with coordinates of the corresponded point pixel by pixel. The relation data are stored in a table. Thereby, high speed and accurate shape measurement is realized. In this paper, a memory board for whole-space tabulation method was developed. An experiment to evaluate this board was performed. The shape measurement speed using the memory board was higher than using software. The shape measurement accuracy using the memory board was the same as using software.
