Projection Method of Small Pitch Fringe Pattern Using Talbot Effect with Super Luminescent Diode for 3D Shape Measurement

Abstract

Accurate 3-D shape measurement systems that use contactless methods are required for appearance inspection of electronic parts in the industrial fields. A fringe projection method using Talbot effect is an effective method to produce the small fringe pitch with a large incident angle. In this paper, a cross-sectional distribution of Talbot fringe patterns in a plane composed of the horizontal axis and the optical axis was visualized. The position and the orientation of the available area can be determined easily with the developed visualizing system. The effectiveness was confirmed with an experiment on a shape measurement using the Talbot fringe patterns generated with an SLD (super luminescent diode) light source.