Talbot干渉格子投影による３次元計測用LEDマルチラインバンドルファイバ光源の試作

抄録

　　　Accurate 3D shape measurement systems by contactless method are required in the quality inspections electronic parts in industrial fields. In this paper, a multi-line fiber array with LED light sources for 3D shape measurement is prototyped. In a previous research, authors developed a measurement system with Talbot fringe projection using super luminescent diodes (SLD). However, the occurrence of speckle noise due to coherency in SLD is a factor to increase the noise of projected fringe pattern. In the method of shape measurement by analysis of grating images, the speckle noise gives large influences to the results. A light source with enough narrower width than the grating pitch is required to generate a Talbot fringe pattern. Therefore, authors developed a multi-line bundle fibers with LED light sources. The effectiveness to reduce the speckle noise was evaluated as an experimental result.