解 説
周期加熱サーモリフレクタンス法によるマイクロスケール領域の熱物性評価技術
キーワード:
Thermoreflectance method,
Periodic heating,
Micro-scale region,
Thermal property,
Material property
2019 年 19 巻 1 号 p. 3-7
詳細
2019 年 19 巻 1 号 p. 3-7
In this paper, evaluation technique of thermal properties of various materials in micro-scale region by means of periodic heating and thermoreflectance (TR) method is described. The TR method has mainly two advantages as compared with other analogical methods. First, the TR method based on a pump-probe optical technique with focused laser beams, characterization of thermal properties in micro-scale region can be realized. Another one is, since a thermal diffusion length depends on a frequency of heating laser beam intensity, estimation depth can be changed down to sub-micrometer range by control the heating frequency. Moreover, the TR method can be expected to be widely applied not only to thermal properties but also to various characterizations such as mechanical properties and electric properties.
