抄録
Phase-shifting digital holographic interferometry can measure small displacement and strain distribution with high-precision, full-field and non-contact. A planar object is needed to be perpendicular to an optical axis of a camera in this strain measurement method. However, in a practical case, the object cannot be placed at the position, according to circumstances. An angle of the planar object is required in order to measure the distribution of the in-plane displacement. In this paper, an optical system which can measure shape and displacement of an object is proposed. In addition, a calculation method for strain distribution on surface of a tilted planar object is proposed. Shape measurement is performed using grating projection method. In-plane deformation and stain distribution of a cantilever was measured by this optical system. The results of the experiment demonstrated the effectiveness of this method.
