Journal of the Japan Society for Precision Engineering
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
Lecture
Applications of High Density Plasma to Optical Micromachines
Kazuhiro HANE, Minoru SASAKI, Yoshiaki KANAMORI
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Keywords: deep reactive etching, optical MEMS, silicon, micromachine
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2007 Volume 73 Issue 9 Pages 980-983

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© 2007 The Japan Society for Precision Engineering
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