Journal of the Japan Society for Precision Engineering
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
Lecture
Numerical Simulation for ULSI Manufacturing Process
Hirokuni HIYAMA, Xinming WANG
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Keywords: Numerical simulation, ULSI manufacturing process, Chemical mechanical polishing (CMP), Electrochemical deposition, Low-k material, Computational fluid dynamics (CFD), Finite element method (FEM), Molecular dynamics (MD)
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2008 Volume 74 Issue 5 Pages 435-440

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© 2008 The Japan Society for Precision Engineering
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