Journal of the Japan Society for Precision Engineering
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
Lecture
Ultra-precision CMP Process of Sapphire Substrate for LEDs and Its Application for PSS Fabrication
Hideo AIDA, Natsuko AOTA, Yutaka KIMURA, Yuki KAWAMATA, Koji KOYAMA, Tsutomu YAMAZAKI, Toshiro DOI
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Keywords: sapphire substrate, LED, CMP, PSS
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2012 Volume 78 Issue 11 Pages 932-936

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