Journal of the Japan Society for Precision Engineering
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
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Volume 78, Issue 11
Displaying 1-24 of 24 articles from this issue
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Special Issue: Ultra-precision Polishing Technologies for Mass Production of Leading Edge Electronic Devices
Review
Lecture
My Experience in Precision Engineering
Gravure & Interview
Introduction to Precision Engineering
Introduction of Laboratories
 
Paper
  • A Study of the Conformal Coating Technique on the 3D Stack Semiconductors Devices
    —1st report, Invention of the Through-Silicon Via (TSV) Coating Method with the Rotary Atomizer Aerosol Spray and Trail Manufacture of a Coating System—
    Yoshiyuki SEIKE, Masanori OHTSUBO, Futoshi SHIMAI, Kenji MARUYAMA, Hir ...
    2012 Volume 78 Issue 11 Pages 965-969
    Published: November 05, 2012
    Released on J-STAGE: May 05, 2013
    DOIhttps://doi.org/10.2493/jjspe.78.965
    JOURNAL FREE ACCESS
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    Semiconductor devices are increasingly sophisticated in their application of three-dimensional laminated chips inside Through-Silicon Via (TSV). TSV is a technology that connects the stacked chips using through electrodes instead of higher integrated circuits densities. In this report, we described the invention of a new photo-resist coating method inside the TSV using the rotary atomizer aerosol spray. The characteristics of the flying droplets from the rotary atomizer aerosol nozzle have been measured by a Shadow Dopper Particle Analyzer (SDPA), and indicated that the new method is capable of coating the photo-resist inside the TSV. Furthermore, we have tried to manufacture the prototype coating system with the rotary atomizer aerosol nozzle and we have run the experiments in to coat the photo-resist inside the TSV Test Element Group (TEG) wafer. Results indicate that this method is able to uniformly coat the photo-resist along the shape of TSV.
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  • Study of the Si-containing amorphous layer by electrical discharge coating
    —Wettability and Erosion Resistance of the Si-containing amorphous layer for Lead-free solder—
    Nobuyuki SUMI, Akihiro GOTO, Hiroyuki TERAMOTO, Yusuke YASUNAGA, Yoshi ...
    2012 Volume 78 Issue 11 Pages 970-974
    Published: November 05, 2012
    Released on J-STAGE: May 05, 2013
    DOIhttps://doi.org/10.2493/jjspe.78.970
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    Si-containing amorphous layer formed by electrical discharge coating has excellent corrosion resistance to aqua regia and erosion resistance to liquid droplet impingement. In this study, wettability and erosion resistance of the layer to lead-free solder were investigated in order to apply the layer as a countermeasure against damage by contacting molten lead-free solder for a long time.
    Wettability test showed that the wettability of lead-free solder became bad when the Si-containing amorphous layer was formed on S50C. The contact angle of lead-free solder became 126 degrees. Furthermore, from the erosion resistance test, it became clear that the layer prevented elution of Fe and formation of reaction layer when the Si-containing amorphous layer was formed on SUS304. Erosion didn't occur on the layer after dipping molten lead-free solder for 500h.
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  • Machining Error Compensation System in End Milling (1st Report)
    —Machining error prediction and NC data modification in ball end milling based on dynamic deflection model—
    Takatoshi NISHIKAWA, Keiichi KIKUTA, Munehiro MONDOU, Takahiro TSUTSUM ...
    2012 Volume 78 Issue 11 Pages 975-979
    Published: November 05, 2012
    Released on J-STAGE: May 05, 2013
    DOIhttps://doi.org/10.2493/jjspe.78.975
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    A machining error compensation system caused by dynamic deflection and shape error of ball end mill was developed. Tool deflection is predicted by instantaneous rigid cutting force and dynamic deflection model with FFT algorithm. Tool shape error is estimated by measuring the diameter of tool during rotating. Machining error is predicted from the tool deflection when cutting edge generates finished surface and the shape error of the edge. The finished surface is detected by rendering image with GPU in short time. NC data generated with CAM software is modified based on the result of error prediction. The system was verified with cutting experiments of cylindrical surface and die model. In the former case, it was shown that the predicted cutting forces, tool deflections, and machining errors were in good agreement with the measured ones, and the maximum machining error decreased from 25.2μm to 7.3μm. In the latter case, machining error was predicted at each tool position about 0.05 second.
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  • Laser-induced Transferring and Periodic Patterning of Au Nanoparticles on Silicon Wafers
    Hirofumi HIDAI, Shogo KEDUKA, Souta MATSUSAKA, Noboru MORITA
    2012 Volume 78 Issue 11 Pages 980-984
    Published: November 05, 2012
    Released on J-STAGE: May 05, 2013
    DOIhttps://doi.org/10.2493/jjspe.78.980
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    A laser forward transfer technique of gold nanoparticles (GNPs) deposited on glass substrates to silicon wafers and periodic patterning of transferred GNPs is demonstrated. Gold colloidal solution was prepared by citric acid reduction method. The GNPs were deposited by immersing glass substrates derivatized with (3-aminopropyl) trimethoxysilane (APTMS) in the gold colloidal solution for 0.5 h - 3 h. Dispersed or aggregated GNPs were deposited by using Gold colloidal solution with different concentrations. The glass substrate deposited with the GNPs was placed on a Si substrate. The GNPs deposited side was faced to the Si substrate. Then GNPs were illuminated with the second harmonic wave of Nd : YAG laser through the glass, as a result the gold nanoparticles were transferred to the Si substrate. The GNPs deposited on the silicon surface was sphere and dispersed, nevertheless, they were aggregated on the glass surface before transferring by the laser illumination. After the illumination of the Nd : YAG laser to the silicon surface with the GNPs, the periodic deposition of Au was observed. The periodic spacing of the Au were depended on the wavelength and incident angle of the laser beam.
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  • Development of Sustainable Society Scenario Simulator toward Sustainable Manufacturing (4th Report)
    —A Method for Drawing Scenario Variants Based on What-if Analysis—
    Yusuke KISHITA, Yuji MIZUNO, Shinichi FUKUSHIGE, Yasushi UMEDA
    2012 Volume 78 Issue 11 Pages 985-991
    Published: November 05, 2012
    Released on J-STAGE: May 05, 2013
    DOIhttps://doi.org/10.2493/jjspe.78.985
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    Designing sustainability scenarios is a promising approach to describing visions and transitions of the manufacturing industry targeting a sustainable society. However, computational assistance in designing such scenarios is not sufficiently provided in the current scenario research. This paper proposes a method for drawing scenario variants by executing what-if analysis of existing scenarios in order to explore different possible futures in the scenario design process. To support composing scenario variants, the method defines scenario rationales that should be changed in the process of what-if analysis. Results of a case study involving an existing sustainability scenario show that the method successfully helps draw a new scenario variant by modifying a part of the rationales of the original scenario. Consequently, 82% of the texts of the new scenario are described from the original scenario.
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  • Effects of Lubricants and Mating Gear Materials on Load Capacity of Plastic Gears
    Ichiro MORIWAKI, Takeshi IMAYOSHI, Morimasa NAKAMURA, Akio UEDA
    2012 Volume 78 Issue 11 Pages 992-997
    Published: November 05, 2012
    Released on J-STAGE: May 05, 2013
    DOIhttps://doi.org/10.2493/jjspe.78.992
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    Improvement of mechanical properties and accuracy of plastic gears enables their applicable fields to have been widespread even for power transmission. They are desired to be used in more severe conditions. One of advantages of plastic gears is the capability of driving without lubricants. For plastic gears being used under the severe conditions, however, lubricants could be used for enhancing their load capacities. In the present study, fatigue tests of POM gears were performed in order to determine effects of lubricants on their service lives. As a result, it was confirmed that lubricants reduced temperature rise of tooth flank, and brought longer service lives of plastic gears independently on temperature. And fatigue tests of POM gears, in which various mating gear materials such as steel, POM, PA46, and PA66 were used, were also performed in order to investigate effects of mating gear materials on service lives of POM gears. It was found that POM gears showed longer service lives when mating gears were not POM gears. Furthermore, using these fatigue test results, the lubricant factor and mating gear factor for the load capacity calculation of plastic gears were calculated according to the JIS entitled draft “Estimation of tooth bending strength of cylindrical plastic gears”.
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  • Improvement of Color of 2-dimensional Color Code Images
    Hirotaka TANAKA, Yasuhiko HARA, Yu HOSOJIMA, Tatahito MIWA
    2012 Volume 78 Issue 11 Pages 998-1003
    Published: November 05, 2012
    Released on J-STAGE: May 05, 2013
    DOIhttps://doi.org/10.2493/jjspe.78.998
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    “Color Construct Code” is a kind of 2-dimensional codes. Color Construct Code is detected by a camera and the detected image can be decoded by software. When the color of detected images is deteriorated, the images are sometimes unable to decode. The aim of this report is to propose a method to improve clearness of color of the images to get better decodability. Improvement methods, “improvement of color and contrast” and “Improvement of whiteness and brightness” are proposed and its effectiveness is presented.
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  • Development of the Quadruped Locomotion Robot using Shape Memory Alloy and Flexible Plate
    Mami NISHIDA
    2012 Volume 78 Issue 11 Pages 1004-1008
    Published: November 05, 2012
    Released on J-STAGE: May 05, 2013
    DOIhttps://doi.org/10.2493/jjspe.78.1004
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    In this paper, the author described a quadruped locomotion robot using a shape memory alloy (SMA) and a flexible plate. First, “Flexible Flat Plate (FFP)” actuator which consisted of the SMA and a thin polyethylene plate was investigated. The locomotion robot was manufactured by combining with a mechanism to drive the legs. Next, the author proposed a method of generating the gait of the robot, and experimentally clarified the simple ON-OFF input-and-output signal timing. The advance and retreat of the robot were possible by changing the phase of the input signal timing. Finally, a walking experiment and a payload experiment were carried out and the effect of the generated ON-OFF input-and-output signal timing was considered. This paper presented a palm-sized quadruped locomotion robot with back-and-forth movement and easy switching of the ON-OFF controls. This robot was able to move at least 30 mm in 30 sec. The robot has the potential to be used in high and low temperatures or where corrosive gases are generated.
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  • Development of Sustainable Society Scenario Simulator toward Sustainable Manufacturing (3rd Report)
    —Design Support of Forecasting Scenarios—
    Yuji MIZUNO, Yusuke KISHITA, Haruna WADA, Shinichi FUKUSHIGE, Yasushi ...
    2012 Volume 78 Issue 11 Pages 1009-1015
    Published: November 05, 2012
    Released on J-STAGE: May 05, 2013
    DOIhttps://doi.org/10.2493/jjspe.78.1009
    JOURNAL FREE ACCESS
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    Developing scenarios is a hopeful approach for drawing visions and pathways of sustainable manufacturing toward sustainable society. Sustainable Society Scenario (3S) Simulator is an integrated design support environment that supports understanding, describing, and analyzing scenarios. This paper proposes a design support method of scenarios in 3S Simulator. Proposed method supports designing scenarios in forecasting manner, in which futures are explored starting from the present. We employ two-leveled causal networks for supporting scenario design in structuring ideas and describing the structured ideas into a scenario, by expressing the structure of the object world of the scenario. In the case study, we verified that the outlines and details of a scenario are deployed from the causal networks. Using 3S Simulator, the relationship between the causal networks and the descriptions of a scenario is clarified. This supports a designer to understand the scenario rationally. As the conclusion, proposed method supports designing scenarios in forecasting manner.
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