Journal of the Japan Society for Precision Engineering
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
Lecture
Displacement Measuring Optical Interferometer (Sinusoidal Frequency/Phase Modulation Interferometer)
Masato AKETAGAWA
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Keywords: interferometer, displacement, interpolation, sinusoidal frequency/phase modulation
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2019 Volume 85 Issue 8 Pages 675-679

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