Journal of the Japan Society for Precision Engineering
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
Lecture
Surface Modification Assisted High-Speed and High-Accurate Manufacturing of Gallium Nitride (GaN)
Masayoshi MIZUTANI, Yoshifumi TAKASU, Keita SHIMADA, Tsunemoto KURIYAGAWA
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Keywords: gallium nitride, semiconductor, wafer, CMP, grinding, tape polishing, ultraviolet, hydroxyl radical, surface modification, oxidation
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2023 Volume 89 Issue 5 Pages 368-372

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