Journal of the Japan Society of Precision Engineering
Print ISSN : 0374-3543
[title in Japanese]
D.J. WHITEHOUSE, D.K. BOWEN, D.G. CHETWYND, S.T. DAVIES
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Keywords: micro calibration on surfaces, calibration system, X-ray interferometry, inter-ferometer, X-ray optics, fine surface texture, thin film deposits, electrical noise
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1985 Volume 51 Issue 9 Pages 1663-1668

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