Journal of the Japan Society of Precision Engineering
Print ISSN : 0374-3543
Volume 51, Issue 9
Displaying 1-22 of 22 articles from this issue
  • D.J. WHITEHOUSE, D.K. BOWEN, D.G. CHETWYND, S.T. DAVIES
    1985 Volume 51 Issue 9 Pages 1663-1668
    Published: September 05, 1985
    Released on J-STAGE: June 30, 2009
    JOURNAL FREE ACCESS
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  • [in Japanese]
    1985 Volume 51 Issue 9 Pages 1669-1673
    Published: September 05, 1985
    Released on J-STAGE: June 30, 2009
    JOURNAL FREE ACCESS
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  • [in Japanese]
    1985 Volume 51 Issue 9 Pages 1674-1677
    Published: September 05, 1985
    Released on J-STAGE: June 30, 2009
    JOURNAL FREE ACCESS
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  • [in Japanese], [in Japanese]
    1985 Volume 51 Issue 9 Pages 1678-1683
    Published: September 05, 1985
    Released on J-STAGE: June 30, 2009
    JOURNAL FREE ACCESS
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  • [in Japanese], [in Japanese], [in Japanese]
    1985 Volume 51 Issue 9 Pages 1684-1688
    Published: September 05, 1985
    Released on J-STAGE: June 30, 2009
    JOURNAL FREE ACCESS
  • [in Japanese], [in Japanese]
    1985 Volume 51 Issue 9 Pages 1689-1694
    Published: September 05, 1985
    Released on J-STAGE: February 16, 2010
    JOURNAL FREE ACCESS
  • [in Japanese]
    1985 Volume 51 Issue 9 Pages 1695-1700
    Published: September 05, 1985
    Released on J-STAGE: June 30, 2009
    JOURNAL FREE ACCESS
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  • Yoshiaki KAKINO, Minpei SHODA, Michiaki HASHITANI, Akihiko FUJIWARA
    1985 Volume 51 Issue 9 Pages 1705-1710
    Published: September 05, 1985
    Released on J-STAGE: June 30, 2009
    JOURNAL FREE ACCESS
    The generation mechanism of thermal cracks has been studied. High speed orthogonal intermittent cutting test was conducted. Acoustic emission signal detected during dry and wet cutting were compared with an aim to confirm the instant of thermal crack generation. Finite element method analysis was then employed to calculate the stress distribution inside the cutting tool in the cutting cycle. From the result of calculation a large peak of τmax which acts repeatedly on the latter part of tool-chip contact area during the cutting period is the cause of thermal cracks. In addition the use of soluble cutting fluid leads to the formation of tensile stress on the rake surface after the disengagement of tool, and thus accelerates the growth of thermal cracks.
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  • Kunio KOYABU, Junji WATANABE, Toshiro KARAKI
    1985 Volume 51 Issue 9 Pages 1711-1717
    Published: September 05, 1985
    Released on J-STAGE: February 16, 2010
    JOURNAL FREE ACCESS
    Anisotropic etching of silicon has been used to form well-shaped islands and smooth etched surfaces on single crystal silicon. To accomplish this, two problems must be overcome; one is a corner undercut which causes deviation from normal shapes. The other is the appearance of small pyramidal hillocks called micropyramids (MP) on the etched surface, which cause incomplete isolation between the islands, and result in a degradation of the bipolar transistor characteristics. The results obtained from corner undercut and MP formation experiments are as follows : (1) Alcohols used as surfactants in KOH solutions inhibited corner undercut but caused MP formation. There was a strong correlation between the inhibition effects and the density of MP appearance, depending on the alcohol molecular weight. (2) The optimal location for the compensative patterns was to place the center of these patterns at the corner point of the etch masks. Optimum size depended on etch depth and the kind of alcohol. (3) It was very difficult to completely inhibit MP formation, but a mirror surface with very few MP (less than 10/cm2) was formed with both KOH + ethyl alcohol solution and defect-free substrates. These results were applied to the fabrication of complementary dielectric isolated substrates, and it was confirmed that high-voltage LSIs formed on these substrates operated normally.
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  • Studies on Wet Grinding Temperature (3rd Report)
    Heiji YASUI
    1985 Volume 51 Issue 9 Pages 1718-1724
    Published: September 05, 1985
    Released on J-STAGE: June 30, 2009
    JOURNAL FREE ACCESS
    In this paper, the influence of table speed, metal removal rate and wheel speed on wet grinding temperature was investigated by measuring the temperature and generated heat in wet and dry grindings, and discussed by considering the occurrence of film boiling phenomenon of grinding fluid in the wheel-workpiece contact zone. Main conclusions obtained are as follows : (1) From the critical grinding condition, grinding fluid begins to lose the effect on cooling and repressing the generated grinding heat. And, over the limiting grinding condition, grinding fluid has little effect on reducing the temperature rise in the wheel-workpiece contact zone. (2) Below the critical grinding condition, the maximum elevated grinding temperature θmax under the same metal removal rate becomes lower for higher table speed and lower wheel speed. And also, the θmax in down-cut grinding becomes lower than that in up-cut grinding. However, the θmax under the same depth of cut becomes lower for lower table speed. (3) When using the grinding fluid much diluted in water, the maximum grinding temperature at the critical metal removal rate is in slightly excess of 100°C being boiling temperature of water. (A) Not only generated grinding heat but grinding conditions is related to the θmax.
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  • Construction of Grinding Data Base System (1st Report)
    Masahiro HIGUCHI, Akishige YANO, Katsuyuki SAKAI, Atsuhiko MORIKAWA
    1985 Volume 51 Issue 9 Pages 1725-1731
    Published: September 05, 1985
    Released on J-STAGE: May 07, 2010
    JOURNAL FREE ACCESS
    The present paper deals with the reliable mathematical model which is rendered indispensably necessary for the construction of the grinding data base system. The built-up mathematical models respond to a request of (1) the stable grinding operation data, (2) the grinding burn data, (3) the chatter data, (4) the surface roughness data, (5) the residual stock removal data, and (6) the out-of-roundness data, respectively. Each model is expressed by the discriminant function employed in the trainable pattern classifying technique and given by an equation of the form
    W1 (log Dt) 2+ W2 (log Df) 2+W3 (log Dt) (log Df) +W4 (log Dt) + W5 (log Df) +W6 (log Pw) + W7 (log Vs) + W8 (log Rv) + W9 (log Rd) + W10
    where Dt, Df, Pw, Vs, Rv, and Rd are dressing depth of cut, dressing speed, depth setting, wheel speed, speed ratio and diameter ratio, respectively, and all of them are the direct control variables by the operator on the machining field. The important features of the mathematical model are the reliability of the predictions and the simplicity in the computation. It is characteristic of our mathematical model that the classification of the grindability can be 'given by only evaluating the sign or the largest value of the discriminant function. And the minimum reliability of approximately 80% can be attained in the classifications, though too much grinding data are not required of us for adjusting the coefficients (W1, W2…, W10).
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  • Takashi UEDA, Akira HOSOKAWA, Akira YAMAMOTO
    1985 Volume 51 Issue 9 Pages 1732-1737
    Published: September 05, 1985
    Released on J-STAGE: June 30, 2009
    JOURNAL FREE ACCESS
    Thermal action of active grains is analyzed theoretically by the one dimensional unsteadystate heat transfer theory. The cooling behavior of these grains during the non-cutting portion of a revolution is mainly treated. The calculated results indicate that the surface temperature of the cutting grain drops chiefly owing to conduction rather than convection heat transfer, in dry grinding. The temperature of active grains on a wheel surface at various cooling times after cutting was measured by means of an infrared radiation pyrometer, in which an optical fiber accepts the infrared flux radiated from the grain surface and transmits it to a photo-detector InAs cell. The mean temperature of grains in cutting is estimated to come at about 1250°C in grinding of 0.55% plain carbon steel by A 36 K wheel, applying the experimental results to the theoretical equation.
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  • Studies on Creep Feed Grinding (3rd Report)
    Seiki MATSUI, Katsuo SYOJI, Tsunemoto KURIYAGAWA
    1985 Volume 51 Issue 9 Pages 1738-1743
    Published: September 05, 1985
    Released on J-STAGE: June 30, 2009
    JOURNAL FREE ACCESS
    This paper describes the availability of soft grade wheels in creep feed grinding. In creep feed grinding, both an increase in grinding force and a burn become serious problems because of loading and dulling on wheel. As one of the methods of improving these problems, maintenance of grinding performance by activating self-sharpening has been proposed. In order to activate self-sharpening, the following two attempts are performed. The first is to increase cutting force per cutting edge. The second is to use a soft grade wheel. From grinding tests with soft grade (C-E) wheels, influences of grinding conditions on wheel wear and grinding force are investigated. As a result of investigations, it is evident that the use of a soft grade wheel under optimum grinding condition is effective and suitable for the creep feed grinding.
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  • Decreasing Characteristics of Substrate Undulation
    Masashige MITSUHASHI
    1985 Volume 51 Issue 9 Pages 1744-1749
    Published: September 05, 1985
    Released on J-STAGE: June 30, 2009
    JOURNAL FREE ACCESS
    This paper deals with decreasing characteristics of disk substrate undulation by grinding. An attempt was made to analyze the decreasing quantity of undulation, when changing grinding conditions. In the analysis, a formula on the pressure distribution between disk substrate undulation and grindstone was derived from Hertz's formula. An equation about the decreasing quantity of undulation was derived involving the pressure distribution. Calculated decreasing quantities of undulation were in agreement with experimental results. This means that undulation can be decreased by pressure inequalities between undulation peak and outskirts. The decreasing characteristics of undulation which has been conceptually considered can be explained well by the derived equation. The grinding conditions of disk substrate are discussed. In order to decrease the undulation with a little stock removal quantity at short grinding time, the disk substrate should be ground with low pressure and with high relative velocity.
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  • Trial Manufacture of Ultra-high Precision Lathe and Some Experimental Studies
    Hiroshi EDA, Kozo KISHI, Kazushi NOMURA, Naoya ARAKAWA
    1985 Volume 51 Issue 9 Pages 1750-1756
    Published: September 05, 1985
    Released on J-STAGE: June 30, 2009
    JOURNAL FREE ACCESS
    This research is primarily aimed, in order to generate mirror surfaces, a personal computer control prototype ultra-high precision lathe has actually been built. Further, the equation of whether the said cutting theory derived from dislocation theory capable of explaining the ultrahigh precision cutting mechanism, observed in experiments employing the PC control ultra-high precision lathe was also studied. (1) The ultra-high precision machined surface roughness achieved with aluminium was Rmax= 0.01μm in PC control system. And also, the flatness is 0.1μm/φ 50 mm. (2) The shearing stress computed based on dislocation theory closely coincides with that obtained from macroscopic machining experiments. (3) A PC controlled ultrahigh precision lathe capable of the results in (1) through (2) above has successfully been constructed on an experimental basis.
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  • Dressing Technique with Diamond Cup Wheel
    Toshikatsu NAKAJIMA, Yoshiyuki UNO, Yoshiyuki YANASE
    1985 Volume 51 Issue 9 Pages 1757-1762
    Published: September 05, 1985
    Released on J-STAGE: June 30, 2009
    JOURNAL FREE ACCESS
    A dressing technique with a diamond cup wheel as a dresser is introduced for higher performance of grinding wheel. In the technique, the rotating diamond cup wheel is fed parallel to the wheel axis. Grinding performance is experimentally investigated under various setting conditions of the dresser, dressing conditions and grinding coditions, analyzing size generation process, grinding force, surface finish, wheel wear and so on. Sharper cutting edges are generated on the acting wheel face in the technique, while the number of cutting edges is slightly fewer than that in conventional method with a single point diamond dresser. Grinding force is therefore smaller while surface finish is rougher and wheel wear is larger as compared with coventional one. Furthermore, the grinding results are hardly affected by dresser wear in the technique, while those are significantly affected in conventional one.
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  • Size Generation Process
    Kenjiro OKAMURA, Heisaburo NAKAGAWA, Dungshe JIN
    1985 Volume 51 Issue 9 Pages 1763-1768
    Published: September 05, 1985
    Released on J-STAGE: February 16, 2010
    JOURNAL FREE ACCESS
    The existence of characteristic phenomena of fine ceramics, which is typical of brittle material, was revealed through the experiments of the transitional cutting with the sintered diamond tool. Each phenomenon such as rubbing, swelling, crack initiation, large-scale fracture, appears according to the interference depth of tool. In this paper, taking these results into account, the grinding process of fine ceramics was fully analyzed in a fixed infeed plunge grinding using a diamond grinding wheel. It becomes clear that in grinding of fine ceramics, the mechanism of material removal depends, on the quantity of real interference depth of wheel, and that the variations of size generation and grinding force are fairly unlike in grinding of metal in three states, namely, transient, steady and spark-out states. Also the effect of interference conditions between grinding wheel and workpiece on grinding phenomena was discussed.
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  • Applied Function of HIMADES-1 (3)
    Katsuhiro KITAJIMA
    1985 Volume 51 Issue 9 Pages 1769-1775
    Published: September 05, 1985
    Released on J-STAGE: June 30, 2009
    JOURNAL FREE ACCESS
    This paper presents a method of recognition of local defect on 3-D object, whose normal geometry is known beforehand. This method has some distinctive features : The normal geometry is generated in the computer by using the solid model of HIMADES-1. Then, the image data from ITV is analyzed and the feature points of basic volume, which are not supposed to be damaged, are detected. From the correspondence between the feature points and the vertices in the model, the transformation matrix, which is concatenated by coordinate transformation, perspective transformation and scaling, is assigned automatically. Based on this transformation matrix, the digitized 2-D pattern is obtained from the model, which shows the virtual line drawing of normal object from the same direction as that of real image from ITV. Then, it is compared with the digitized 2-D pattern from the real image, using the pattern matching method designed for this purpose. As the result, the local defect is detected. Some experiments show the effectiveness of this method.
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  • Masataka OHTA
    1985 Volume 51 Issue 9 Pages 1776-1782
    Published: September 05, 1985
    Released on J-STAGE: February 16, 2010
    JOURNAL FREE ACCESS
    This paper presents a method of designing the print hammer or the wire driving lever of an impact printer. A beam with a mass at the free end and a rigid body around the pivot point is considered to be the essential structure of a print hammer, and the relationship of this funda-mental structure to the impact force is studied. The driving point mechanical immittances are derived from this infinite degrees of freedom model taking account of the boundary conditions ; these equations are expanded to infinite series by use of Mittag-Leffler's theorem. One of the ordinary methods of designing an acoustic apparatus is to use the equivalent circuit. But in the case presented here, it is more convenient to use the equivalent mechanism which is expressed in terms of simple vibrating systems. To describe such mechanism, two types of simple massspring systems, those with resonant and anti-resonant vibrating elements, and additional mechanisms are considered. These expressions enable us to obtain the approximate impact force more easily than by other methods. Impact forces calculated by use of these expressions and while neglecting higher order vibrations show good correlation with those measured experimentally.
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  • Shinji KASEI
    1985 Volume 51 Issue 9 Pages 1783-1788
    Published: September 05, 1985
    Released on J-STAGE: June 30, 2009
    JOURNAL FREE ACCESS
    This paper presents the results of examination on the theory for the self-loosening mechanism of bolted joints, by A. Yamamoto and S. Kasei, through the experiments under different loading conditions. It is the main theme to make clear whether the theory can become or not a basic way of thinking which can be suitable for the thread-loosening under whole cases of transverse external force. Considering results obtained from the experiments in which vibration (frequency range ; to 10 Hz) and impact tests are made, it is shown that the fundamental difference is not found in the behavior of self-loosening and that the above-mentioned theory can be regarded to be basically applicable to the cases of transverse external force.
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  • Kazuo MARUYAMA, Nobuyoshi DEGUCHI, Shigeyuki MOTOHASHI, Isamu YOSHIMOT ...
    1985 Volume 51 Issue 9 Pages 1789-1794
    Published: September 05, 1985
    Released on J-STAGE: June 30, 2009
    JOURNAL FREE ACCESS
    In order to establish the electric standard system, which was renewed in 1977 in Japan, a precision solenoid for electric standard use, manufactured by winding a copper wire on a quartz bobbin having threads, is required. In the first stage, the lead accuracy of the bobbin was measured using two electric comparator's gauge heads as contact feelers. But this method of measurement has some problems. That is, threads on the bobbin are easy to be damaged during the measurement and it takes a lots of time in the measurement. Therefore, in order to solve these problems, the non-contact feelers are introduced, which consist of microscope, pin photodiode and amplifier. The main results in this reports are as follows : (1) The non-contact measurement of the threads having a large diameter and a small pitch is made possible. (2) The precision of measurement for repeatability expressed by the standard deviation is 0.22 μm at maximum. (3) The results in the measurement of cumulative pitch accuracy using non-contact feelers and contact feelers show the same trend in the regression analysis using the method of least squares. (4) The measuring time for cumulative pitch accuracy is shortened to 1/10 compared with that in the case of contact feelers.
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  • Shuzo HATTORI, Yoshiyuki UCHIDA, Vijay Trimbak CHITNIS
    1985 Volume 51 Issue 9 Pages 1795-1800
    Published: September 05, 1985
    Released on J-STAGE: June 30, 2009
    JOURNAL FREE ACCESS
    This paper presents an automatic and precise alignment technique for X-ray lithographic masks, using two pairs of moiré gratings, with their respective moiré signals 180° out of phase with each other. The moiré signals are detected in the zeroth order beams and the difference between these two signals is used to control the alignment of an X-Y stage through a stepping motor. The precision of the present system is decided by the pitch of the gratings, the relative displacement between the gratings per step of the stepping motor, S/N of the system and the response time of the servoloop. Experiments were carried out using grating pitch of 200μm, displacement corresponding to one step of the stepping motor as 0.028μm, pulse frequency of 15 Hz and a response time of 0.13 s. With these parameters a precision better than ±0.06 μm was obtained. The design considerations of a suitable X-ray lithographic mask alignment system are given.
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