Journal of the Japan Society for Precision Engineering
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
Diamond Film Grown by Microwave Plasma-assisted Vapor Deposition
Yoichiro SATO
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Keywords: diamond, diamond film, chemical vapor deposition, plasma-assisted vapor deposition, microWave plasma-assisted vapor deposition, growth of diamond, vapor growth, microwave plasma
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1987 Volume 53 Issue 10 Pages 1511-1514

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