Journal of the Japan Society for Precision Engineering
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
Growth of Diamond Thin Films by Electron Assisted and DC Plasma Chemical Vapor Deposition
Tadao INUZUKA, Atsuhito SAWABE
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Keywords: diamond, thin film, CVD, plasma, EACVD
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1987 Volume 53 Issue 10 Pages 1515-1518

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