Journal of the Japan Society for Precision Engineering
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
Synthesis of Cubic Boron Nitride Film by an RF Plasma CVD Method
Takashi ISHIGURO, Hidetoshi SAITOH, Yukio ICHINOSE
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Keywords: cubic boron nitride, hexagonal boron nitride, RF plasma CVD, cyclotriborazane: (BH2NH2)3, activated hydrogen, infrared absorption spectra
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1987 Volume 53 Issue 10 Pages 1527-1531

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