Journal of the Japan Society for Precision Engineering
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
Cubic BN Film Formation by Laser PVD
Shinei MINETA, Nobuo YASUNAGA
Author information
Keywords: laser PVD, cubic BN film, hexagonal BN, amorphous structure, ion source, acceleration voltage, ionization, stoichiometric
JOURNAL FREE ACCESS

1987 Volume 53 Issue 10 Pages 1532-1535

Details
Download PDF (2637K)
Download citation RIS

(compatible with EndNote, Reference Manager, ProCite, RefWorks)

BIB TEX

(compatible with BibDesk, LaTeX)

Text
How to download citation
Contact us
Abstract
[in Japanese]
Content from these authors
© by The Japan Society for Precision Engineering
Previous article Next article
Favorites & Alerts

Recently viewed articles
Predecessor

Journal of the Japan Society of Precision Engineering

Journal of the Japan Society for Precision Engineering, Contributed Papers

Share this page
feedback
 Top