Journal of the Japan Society for Precision Engineering
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
cBN Film Prepared by the ARE (Activated Reactive Evaporation) Method
Konosuke INAGAWA, Kazuhiro WATANABE, Kazuya SAITOH, Yoshiyuki YUCHI, Akio ITOH
Author information
Keywords: cubic boron nitride, boron nitride film, activated reactive evaporation, gas activation nozzle, hollow cathode discharge, electron beam, physical vapor deposition
JOURNAL FREE ACCESS

1987 Volume 53 Issue 10 Pages 1536-1539

Details
Download PDF (2286K)
Download citation RIS

(compatible with EndNote, Reference Manager, ProCite, RefWorks)

BIB TEX

(compatible with BibDesk, LaTeX)

Text
How to download citation
Contact us
Article 1st page
Content from these authors
© by The Japan Society for Precision Engineering
Previous article Next article
Favorites & Alerts

Recently viewed articles
Predecessor

Journal of the Japan Society of Precision Engineering

Journal of the Japan Society for Precision Engineering, Contributed Papers

Share this page
feedback
 Top