Journal of the Japan Society for Precision Engineering
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
Research and Development of STM
Koji KAJIMURAWataru MIZUTANIMasatoshi ONO
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1987 Volume 53 Issue 12 Pages 1811-1816

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