Journal of the Japan Society for Precision Engineering
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
Application of STM to Precision Measurement
Hirofumi YAMADA
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Keywords: scanning tunneling microscope, atomic force microscope, surface microtopography, surface profile measurement, roughness measurement
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1987 Volume 53 Issue 12 Pages 1817-1821

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