Journal of the Japan Society for Precision Engineering
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
Cleaning Technology of the Parts for Precision Equipment
Yutaka HIRATSUKA
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Keywords: precision part cleaning, precision equipment, semiconductor process equipment, vapour degreasing, high pressure spraying, aqueous ultrasonic cleaning, surface roughness, cleaning efficiency, particle removing, clean room
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1988 Volume 54 Issue 10 Pages 1854-1857

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