Journal of the Japan Society for Precision Engineering
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
Automated IC Manufactring Technolgy
Hiroyuki HARADA
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Keywords: automated IC manufacturing, cassette to cassette, C-C, job shop, wafer transportation system, standardization for IC equipment, weight of cassette, weight of wafer
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1988 Volume 54 Issue 10 Pages 1871-1876

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