Smoothing of Diamond Films by Ion Beam Irradiation

Abstract

In this paper, smoothing of CVD diamond films by ion beam irradiation has been described. Diamond films are synthesized by arc discharge plasma jet CVD and microwave plasma CVD. Argon and oxygen gases are used as an ionized gas. As a result, by setting up an incident angle at 0° and 80°, smooth surfaces of diamond films have been obtained. When an ion beam is irradiated to microwave plasma CVD diamond films at 80°, the surface roughness is reduced from 3μmRmax to 0. 5μmRmax. Moreover, the mechanism ofsmoothing process of diamond films has been considered and described as a simple model.